Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864182 | Method of producing large-area membrane masks by dry etching | Jörg Butschke, Albrecht Ehrmann, Karl Kragler, Florian Letzkus, Christian Reuter | 2005-03-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864182 | Method of producing large-area membrane masks by dry etching | Jörg Butschke, Albrecht Ehrmann, Karl Kragler, Florian Letzkus, Christian Reuter | 2005-03-08 |