Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838216 | Photolithographic mask and methods for producing a structure and of exposing a wafer in a projection apparatus | Uwe Griesinger, Mario Hennig, Jurgen Knobloch, Manuel Vorwerk | 2005-01-04 |