Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890699 | Polymer material having a low glass transition temperature for use in chemically amplified photoresists for semiconductor production | Kerstin Seibold | 2005-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890699 | Polymer material having a low glass transition temperature for use in chemically amplified photoresists for semiconductor production | Kerstin Seibold | 2005-05-10 |