Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6981241 | Method for eliminating phase conflict centers in alternating phase masks, and method for producing alternating phase masks | Burkhard Ludwig | 2005-12-27 |
| 6957414 | Method for determining the ability to project images of integrated semiconductor circuits onto alternating phase masks | Burkhard Ludwig | 2005-10-18 |