Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6867137 | Fabrication method for a semiconductor structure having a partly filled trench | Jana Hänsel | 2005-03-15 |
| 6852639 | Etching processing method for a material layer | Jens Stolze, Thomas Morgenstern, Jana Haensel | 2005-02-08 |