Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919255 | Semiconductor trench structure | Albert Birner, Thomas Hecht, Lars Heineck, Stephan Kudelka, Jorn Lutzen +2 more | 2005-07-19 |
| 6903454 | Contact spring configuration for contacting a semiconductor wafer and method for producing a contact spring configuration | Albert Birner, Martin Franosch | 2005-06-07 |
| 6878600 | Method for fabricating trench capacitors and semiconductor device with trench capacitors | Albert Birner, Martin Franosch | 2005-04-12 |
| 6873000 | Storage cell field and method of producing the same | Till Schlosser | 2005-03-29 |
| 6864188 | Semiconductor configuration and process for etching a layer of the semiconductor configuration using a silicon-containing etching mask | — | 2005-03-08 |
| 6863769 | Configuration and method for making contact with the back surface of a semiconductor substrate | Albert Birner, Martin Franosch, Volker Lehmann, Jorn Lutzen | 2005-03-08 |
| 6861312 | Method for fabricating a trench structure | Albert Birner, Joern Luetzen | 2005-03-01 |