Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6880560 | Substrate processing apparatus for processing substrates using dense phase gas and sonic waves | Vincent Perrut, Vincent Ruch, Gilles Fresquet | 2005-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6880560 | Substrate processing apparatus for processing substrates using dense phase gas and sonic waves | Vincent Perrut, Vincent Ruch, Gilles Fresquet | 2005-04-19 |