Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900505 | Method of forming refractory metal contact in an opening, and resulting structure | Jonanthan D. Chapple-Sokol, Randy W. Mann, Jed H. Rankin, Daniel S. Vanslette | 2005-05-31 |
| 6882052 | Plasma enhanced liner | — | 2005-04-19 |
| 6838364 | Sputtered tungsten diffusion barrier for improved interconnect robustness | Stephen Bruce Brodsky, Matthew J. Rutten, David C. Strippe, Daniel S. Vanslette | 2005-01-04 |