Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980937 | Method and system for quantifying the step profile characteristics semiconductor features using surface analysis data | — | 2005-12-27 |
| 6864189 | Methodology for measuring and controlling film thickness profiles | Michael C. Triplett | 2005-03-08 |