Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939664 | Low-activation energy silicon-containing resist system | Wu-Song Huang, Robert David Allen, Marie Angelopoulos, Ranee W. Kwong | 2005-09-06 |
| 6927015 | Underlayer compositions for multilayer lithographic processes | Mahmoud Khojasteh, Timothy Hughes, Ranee W. Kwong, Pushkara R. Varanasi, William R. Brunsvold +4 more | 2005-08-09 |