Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949397 | Fabrication of silicon micro mechanical structures | Roy H. Magnuson, Ute Drechsler | 2005-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949397 | Fabrication of silicon micro mechanical structures | Roy H. Magnuson, Ute Drechsler | 2005-09-27 |