Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899785 | Method of stabilizing oxide etch and chamber performance using seasoning | Kellie L. Dutra, Margaret L. Gibson, Ronald G. Meunier | 2005-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899785 | Method of stabilizing oxide etch and chamber performance using seasoning | Kellie L. Dutra, Margaret L. Gibson, Ronald G. Meunier | 2005-05-31 |