Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927005 | Alternating phase shift mask design with optimized phase shapes | Lars Liebmann, Carlos A. Fonseca, Mark A. Lavin | 2005-08-09 |
| 6901576 | Phase-width balanced alternating phase shift mask design | Lars Liebmann, Carlos A. Fonseca | 2005-05-31 |