Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972928 | Isotropic deposition for trench narrowing of features to be created by reactive ion etch processing | Howard Gordon Zolla, Hong Xu, James B. Kruger | 2005-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972928 | Isotropic deposition for trench narrowing of features to be created by reactive ion etch processing | Howard Gordon Zolla, Hong Xu, James B. Kruger | 2005-12-06 |