Issued Patents 2005
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967312 | Semiconductor manufacturing/testing ceramic heater, production method for the ceramic heater and production system for the ceramic heater | Yasuiji Hiramatsu, Satoru Kariya | 2005-11-22 |
| 6964812 | Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor | Yasuji Hiramatsu | 2005-11-15 |
| 6960743 | Ceramic substrate for semiconductor manufacturing, and method of manufacturing the ceramic substrate | Yasuji Hiramatsu | 2005-11-01 |
| 6956186 | Ceramic heater | Yasuji Hiramatsu | 2005-10-18 |
| 6936343 | Ceramic substrate | Yasuji Hiramatsu | 2005-08-30 |
| 6929874 | Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck | Yasuji Hiramatsu | 2005-08-16 |
| 6924464 | Ceramic heater and manufacturing method of ceramic heater | Yanling Zhou, Satoru Kariya | 2005-08-02 |
| 6921881 | Ceramic joint body | Kazuteru Ohkura | 2005-07-26 |
| 6919124 | Ceramic substrate | — | 2005-07-19 |
| 6917020 | Ceramic heater | — | 2005-07-12 |
| 6900149 | Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor | Yasuji Hiramatsu | 2005-05-31 |
| 6897414 | Ceramic heater for semiconductor manufacturing/testing apparatus | Kazutaka Mashima | 2005-05-24 |
| 6891263 | Ceramic substrate for a semiconductor production/inspection device | Yasuji Hiramatsu | 2005-05-10 |
| 6888236 | Ceramic substrate for manufacture/inspection of semiconductor | Yasuji Hiramatsu, Atsushi Ozaki | 2005-05-03 |
| 6887316 | Ceramic heater | Yasuji Hiramatsu | 2005-05-03 |
| 6884972 | Ceramic plate for a semiconductor producing/inspecting apparatus | Yasuji Hiramatsu | 2005-04-26 |
| 6878907 | Ceramic substrate and process for producing the same | Yasuji Hiramatsu | 2005-04-12 |
| 6878906 | Ceramic heater for semiconductor manufacturing and inspecting equipment | Atsushi Ito | 2005-04-12 |
| 6861165 | Aluminum nitride sintered compact, ceramic substrate, ceramic heater and electrostatic chuck | Yasuji Hiramatsu | 2005-03-01 |
| 6861620 | Ceramic heater | Yasuji Hiramatsu | 2005-03-01 |
| 6849938 | Ceramic substrate for semiconductor production and inspection | — | 2005-02-01 |