Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6844119 | Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask | Hideaki Mitsui, Laurent Dieu | 2005-01-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6844119 | Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask | Hideaki Mitsui, Laurent Dieu | 2005-01-18 |