Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899979 | Photomask blank, photomask, methods of manufacturing the same, and method of forming micropattern | Haruhiko Yamagata, Masao Ushida | 2005-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899979 | Photomask blank, photomask, methods of manufacturing the same, and method of forming micropattern | Haruhiko Yamagata, Masao Ushida | 2005-05-31 |