Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949807 | Signal routing in a hermetically sealed MEMS device | Peter Cousseau | 2005-09-27 |
| 6935175 | Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping | David Malametz | 2005-08-30 |
| 6910379 | Out-of-plane compensation suspension for an accelerometer | Gary J. Ballas | 2005-06-28 |
| 6897538 | Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures | — | 2005-05-24 |