Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930313 | Emission source having carbon nanotube, electron microscope using this emission source, and electron beam drawing device | Tadashi Fujieda, Kishio Hidaka, Mitsuo Hayashibara, Shuichi Suzuki, Toshiaki Horiuchi | 2005-08-16 |