Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6875326 | Plasma processing apparatus with real-time particle filter | Hiroshi Inaba, Shinji Sasaki, Kenji Furusawa, Minoru Yamasaka, Atsushi Amatatsu +1 more | 2005-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6875326 | Plasma processing apparatus with real-time particle filter | Hiroshi Inaba, Shinji Sasaki, Kenji Furusawa, Minoru Yamasaka, Atsushi Amatatsu +1 more | 2005-04-05 |