Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946405 | Polyparaxylylene film, production method therefor and semiconductor device | Akio Takahashi, Yuichi Satsu, Igor Yefimovich Kardash, Andrei Vladimirovich Pebalk, Sergei Nicolaevich Chvalun +1 more | 2005-09-20 |