Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952380 | Apparatus and method for recording information | Atsuko Kuroda, Takayuki Ichihara, Masafumi Mochizuki, Takuya Matsumoto | 2005-10-04 |
| 6839142 | Laser interferometer displacement measuring system, exposure apparatus, and electron beam lithography apparatus | Masakazu Sugaya, Tatsundo Suzuki, Masahiro Yamaoka, Sumio Hosaka | 2005-01-04 |