Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905963 | Fabrication of B-doped silicon film by LPCVD method using BCI3 and SiH4 gases | Takaaki Noda, Akira Morohashi | 2005-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905963 | Fabrication of B-doped silicon film by LPCVD method using BCI3 and SiH4 gases | Takaaki Noda, Akira Morohashi | 2005-06-14 |