Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905811 | Method to form reduced dimension pattern with good edge roughness | Chao-Peng Chen, Chunping Luo, Jei-Wei Chang | 2005-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905811 | Method to form reduced dimension pattern with good edge roughness | Chao-Peng Chen, Chunping Luo, Jei-Wei Chang | 2005-06-14 |