Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900001 | Method for modifying resist images by electron beam exposure | Matthew Ross | 2005-05-31 |
| 6890825 | Method for controlling dopant profiles and dopant activation by electron beam processing | Matthew Ross, Charles Hannes | 2005-05-10 |