Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969629 | Method for manufacturing micro-structural unit | Norinao Kouma, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda +2 more | 2005-11-29 |
| 6946398 | Method for fabricating a micro machine | Shoji Okuda, Hiroshi Tokunaga | 2005-09-20 |
| 6936510 | Semiconductor device with self-aligned contact and its manufacture | Kazuo Itabashi, Yuji Yokoyama, Kenichi Inoue, Koichi Hashimoto, Wataru Futo | 2005-08-30 |
| 6921693 | Semiconductor device and process for fabricating the same | Tomohiko Tsutsumi, Kazutaka Yoshizawa | 2005-07-26 |
| 6891650 | Micromirror unit fabrication method and micromirror unit made by the same | Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Hisao Okuda, Fumio Yamagishi +1 more | 2005-05-10 |
| 6887396 | Micromirror unit and method of making the same | Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Fumio Yamagishi | 2005-05-03 |
| 6881649 | Method of making device chips collectively from common material substrate | Norinao Kouma, Yoshihiro Mizuno, Hisao Okuda, Ippei Sawaki, Yoshitaka Nakamura | 2005-04-19 |