Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884066 | Thermal process station with heated lid | Richard Sims, Xiaoguang Zhu | 2005-04-26 |
| 6838115 | Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devices | Devendra Kumar, Jeffrey Womack, Jack S. Kasahara, Sokol Ibrani | 2005-01-04 |