Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927887 | Holographic illuminator for synchrotron-based projection lithography systems | — | 2005-08-09 |
| 6861273 | Method of fabricating reflection-mode EUV diffusers | Erik Anderson | 2005-03-01 |
| 6859263 | Apparatus for generating partially coherent radiation | — | 2005-02-22 |