Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953557 | Process and apparatus for treating semiconductor production exhaust gases | Hiroshi Ikeda, Yasuhiro Kubota | 2005-10-11 |
| 6949225 | Method and apparatus for treating a waste gas containing fluorine-containing compounds | Yoichi Mori, Toyoji Shinohara | 2005-09-27 |