Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970292 | Beam shaping element for use in a lithographic system | Michael R. Feldman | 2005-11-29 |
| 6847485 | Beam shaping element for use in a lithographic system | Michael R. Feldman | 2005-01-25 |
| 6844978 | Wafer level creation of multiple optical elements | Brian Harden, Michael R. Feldman | 2005-01-18 |