Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6973829 | Semiconductor dynamic quantity sensor with movable electrode and fixed electrode supported by support substrate | Yoshiyuki Kato, Minoru Murata | 2005-12-13 |
| 6973844 | Semiconductor mechanical quantity sensor | — | 2005-12-13 |
| 6906394 | Method of manufacturing semiconductor device capable of sensing dynamic quantity | Hiroshi Muto, Tsuyoshi Fukada, Kenichi Ao, Yukihiro Takeuchi, Kazuhiko Kano +1 more | 2005-06-14 |
| 6848309 | Capacitive type dynamic quantity sensor | — | 2005-02-01 |
| 6841840 | Capacitive dynamic quantity sensor | — | 2005-01-11 |