Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975409 | Illumination device; and coordinate measuring instrument having an illumination device | Lambert Danner, Gerhard Hoppen | 2005-12-13 |
| 6943901 | Critical dimension measuring instrument | Lambert Danner | 2005-09-13 |
| 6879440 | Autofocus module and method for a microscope-based system | Lambert Danner, Robert Mainberger, Michael Veith, Martin Osterfeld, Uwe Graf | 2005-04-12 |