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Yoshiyuki Nakazawa

DC Dainippon Screen Mfg. Co.: 1 patents #23 of 102Top 25%
Overall (2005): #70,664 of 245,428Top 30%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6938649 Substrate holding device, substrate processing apparatus, and method of releasing substrate — 2005-09-06