Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6885815 | Thermal processing apparatus performing irradiating a substrate with light | Yuko Ikumi | 2005-04-26 |
| 6859616 | Apparatus for and method of heat treatment by light irradiation | Tsutomu Ueyama | 2005-02-22 |
| 6856762 | Light irradiation type thermal processing apparatus | Hiromi Murayama, Yasuhiro Imaoka | 2005-02-15 |
| 6843202 | Thermal processing apparatus for substrate employing photoirradiation | — | 2005-01-18 |