Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6869736 | Halftone phase shift photomask and blank for halftone phase shift photomask | Hiro-o Nakagawa, Toshiaki Motonaga, Yoshinori Kinase, Satoshi Yusa, Shigeki Sumida +3 more | 2005-03-22 |