Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927405 | Method for obtaining an extreme ultraviolet radiation source, radiation source and use in lithography | Laurence Bonnet, Danièle Babonneau | 2005-08-09 |
RM
Rémy Marmoret
Overall (2005): #117,673 of 245,428Top 50%
1
Patents 2005