Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855622 | Method and apparatus for forming a cavity in a semiconductor substrate using a charged particle beam | Erwan Le Roy | 2005-02-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855622 | Method and apparatus for forming a cavity in a semiconductor substrate using a charged particle beam | Erwan Le Roy | 2005-02-15 |