Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6914675 | Ellipsometric method and control device for making a thin-layered component | — | 2005-07-05 |
| 6868312 | Method for real-time control of the fabrication of a thin-film structure by ellipsometric measurement | Thibaut Heitz, Jean-Christophe Rostaing | 2005-03-15 |