Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6867913 | 6-mirror microlithography projection objective | Hans-Jurgen Mann, Udo Dinger | 2005-03-15 |
| 6844994 | Optical element deformation system | Frank Melzer, Bernhard Gellrich, Franz Sorg, Stefan Xalter, Thomas Ittner | 2005-01-18 |