Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6926934 | Method and apparatus for deposited film | Atsushi Koike, Masahiro Kanai, Hiroshi Sugai | 2005-08-09 |
| 6881684 | Method of forming silicon nitride deposited film | Masahiro Kanai, Atsushi Koike, Tomokazu Sushihara | 2005-04-19 |