Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946167 | Deposited film forming apparatus and deposited film forming method | Kazuto Hosoi, Kazuhiko Takada, Ryuji Okamura, Kazuyoshi Akiyama, Hitoshi Murayama | 2005-09-20 |
| 6861373 | Vacuum processing method and semiconductor device manufacturing method in which high-frequency powers having mutually different frequencies are applied to at least one electrode | Makoto Aoki, Hiroaki Niino, Kazuyoshi Akiyama, Hitoshi Murayama, Shinji Tsuchida +2 more | 2005-03-01 |
| 6849123 | Plasma processing method and method for manufacturing semiconductor device | Hiroaki Niino, Hitoshi Murayama, Makoto Aoki | 2005-02-01 |