Toshinobu Tokita

Canon: 2 patents #488 of 2,436Top 25%

Overall (2005): #30,824 of 245,428Top 15%

Patents 2005

Issued Patents 2005

Showing 1–2 of 2 patents

Patent #	Title	Co-Inventors	Date
6972844	Microprocessing apparatus, semiconductor device manufacturing apparatus, and device manufacturing method	—	2005-12-06
6876438	Semiconductor exposure apparatus, control method therefor, and semiconductor device manufacturing method	—	2005-04-05