Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946666 | Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same | Kenji Saito, Mitsuro Sugita | 2005-09-20 |
| 6922910 | Exposure apparatus | Yoshitomo Nagahashi, Takaaki Kimura, Shinichi Takagi | 2005-08-02 |
| 6919951 | Illumination system, projection exposure apparatus and device manufacturing method | — | 2005-07-19 |
| 6903799 | Exposure method and exposure apparatus | Takaaki Kimura | 2005-06-07 |
| 6885432 | Projection exposure apparatus and device manufacturing method | — | 2005-04-26 |
| 6856392 | Optical element with alignment mark, and optical system having such optical element | — | 2005-02-15 |
| 6850327 | Inspection method and apparatus for projection optical systems | Tetsuo Taniguchi | 2005-02-01 |