TH

Tomoharu Hase

Canon: 2 patents #488 of 2,436Top 25%
Overall (2005): #31,349 of 245,428Top 15%
2
Patents 2005

Issued Patents 2005

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6967706 Exposure apparatus and device manufacturing method including gas purging of a space containing optical components — 2005-11-22
6853439 Exposure apparatus and device manufacturing method including gas purging of a space containing optical components — 2005-02-08