Shuichi Yabu

Canon: 2 patents #488 of 2,436Top 25%

Overall (2005): #34,802 of 245,428Top 15%

Patents 2005

Issued Patents 2005

Showing 1–2 of 2 patents

Patent #	Title	Co-Inventors	Date
6947140	Birefringence measurement apparatus and method	—	2005-09-20
6873397	Exposure apparatus, gas replacing method, and method of manufacturing a semiconductor device	—	2005-03-29