Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954041 | Supporting apparatus having a plurality of magnets that generate a floating force and method, stage apparatus, and exposure apparatus | — | 2005-10-11 |
| 6952254 | Supporting system in exposure apparatus | — | 2005-10-04 |
| 6946757 | Stage apparatus and method of controlling the same | — | 2005-09-20 |
| 6917046 | Positioning apparatus, charged-particle-beam exposure apparatus, and device manufacturing method | — | 2005-07-12 |
| 6903468 | Moving stage device in exposure apparatus | — | 2005-06-07 |
| 6873404 | Stage apparatus and method of driving the same | — | 2005-03-29 |
| 6864602 | Linear motor, stage apparatus, and exposure apparatus | — | 2005-03-08 |
| 6859257 | Stage system | — | 2005-02-22 |