Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916678 | Surface modification method | Hideo Kitagawa, Shinzo Uchiyama | 2005-07-12 |
| 6884318 | Plasma processing system and surface processing method | — | 2005-04-26 |
| 6870123 | Microwave applicator, plasma processing apparatus having same, and plasma processing method | Shigenobu Yokoshima | 2005-03-22 |