Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897559 | Silicon-based thin film forming apparatus, silicon-based thin film forming method and semiconductor element | Takaharu Kondo, Akira Sakai | 2005-05-24 |
KM
Koichi Matsuda
Overall (2005): #156,068 of 245,428Top 65%
1
Patents 2005