Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968529 | Phase shift mask, and exposure method and device manufacturing method using the same | — | 2005-11-22 |
| 6839890 | Mask manufacturing method | Mitsuro Sugita, Kenji Saitoh | 2005-01-04 |