Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980872 | Information providing method and system | Ichiro Kano, Kaoru Mizushiri, Masahiro Ohtake, Shinji Utamura, Nobuaki Ogushi +2 more | 2005-12-27 |
| 6975384 | Exposure apparatus and method | — | 2005-12-13 |
| 6972847 | Position detecting system and exposure apparatus using the same | Minoru Yoshii, Masanobu Hasegawa, Takashi Satoh | 2005-12-06 |
| 6965435 | Interferometer system for measuring surface shape | — | 2005-11-15 |
| 6957112 | Industrial machine management system and method | Nobuaki Ogushi, Masaya Ogura | 2005-10-18 |
| 6950179 | Shape measuring apparatus, shape measuring method, and aligning method | Koichi Sentoku, Takahiro Matsumoto | 2005-09-27 |
| 6940586 | Exposure apparatus and method | — | 2005-09-06 |
| 6906805 | Position detecting system and exposure apparatus using the same | Minoru Yoshii, Masanobu Hasegawa, Takashi Satoh | 2005-06-14 |